Dwarven Gold Deluxe

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    Medium and small size light cover

    Main application areas: 1.ICIC bumping mask; 2. Mask plate for MEMS, LED and discrete devices; 3. Optical device, mask plate for optical communication.

    1. Detailed information

    Accuracy of chrome plate(Standard Size:6inch Quartz)

    Item/ClassABCDEFG
    Min.Line/Space
    Width on Wafer(4X)
    >1.0um1.0um0.8um0.5um0.35um0.2um0.15um
    CD MTT±0.3um±0.25um±0.2um±0.15um±0.1um±0.06um±0.05um
    CD Range0.4um0.3um0.25um0.2um0.15um0.06um0.05um
    Registration Accuracy±0.3um±0.25um±0.2um±0.15um±0.1um±0.08um±0.06um
    Overlay Accuracy±0.3um±0.25um±0.2um±0.15um±0.1um±0.08um±0.06um
    Defect Size<1.5um<1.0um<0.75um<0.5um<0.5um<0.4um<0.2um


    Chrome plate material (Photomask blank phate) 

    Materials

    Soda Lime GlassQuartz

    Conventional size

    3006,4009,5009,6012,6025,7012,9012,12"x12",14"x14"

    thickness

    1.5±0.2mm,2.3±0.2mm ,3.0±0.2mm ,4.8±0.2mm

    6.35±0.2mm (QZ)

    Chromium film

    Low Reflectance Chrome

    Optical density (λ=450nm)

    Between Plates3.0±0.3 In Plate±0.3

    reflectance (λ=436nm)

    Between Plates10±5% In Plate±2%

     


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